SP Series
Induction Heated Furnace
for Silicon Carbide with Process Technology
• Fully automated, turnkey furnace with processes available for maximum productivity
• The growth process begins with push button loading starts automated process
• The growth process can also be operated in manual mode for R&D purposes
• Two Models:
o SP-100: 100mm
o SP-150: 150-200mm
• SP-150 is the first 200mm (8”) capable furnace sold commercially
• Coil movement during growth as low as 20μm per step
• Base pressure of 10-7 mbar for the best purity, repeatability and quality
• User-friendly proprietary Aymont automated PLC control with recipes, color touch screen and safety interlocks/alarms
• Crucible rotation at 0.5 to 20 RPM for maximum uniformity and repeatability
• Process can be operated using simple or complex power control, or temperature control using two-color pyrometers
• Device-quality and thick crystals with optional process demonstration