www.aymont.com

"Making hard applications easier"       http://www.aymont.com      

Aymont Technology Aymont Technology offers a line of affordable Silicon Carbide Sublimation Furnaces and Epitaxial Growth (Epi) Reactors that can be customized to meet your specific requirements.

Additionally, if you do not want to purchase your own hardware, Aymont has in-house capabilities available for contract work.

Read more about our furnaces and reactors below and contact us if you have any questions.

Silicon Carbide Sublimation Furnaces

Aymont Technology

Key Features & Capabilities

  • Reactors for 2" and 100 mm diameter wafers available
  • Heating to > 2400°C
  • Double-walled water-cooled chamber
  • Inductively heated
  • Equipped with adjustable coil movement and coil rotation
  • Offered with standard SiC process as part of package
  • Advanced processes available upon request
  • Usable for sublimation growth of various materials including Silicon Carbide (SiC), Aluminum Nitride (AlN) and Gallium Nitride (GaN)

Standard Equipment Configuration

  • Base pressure: < 3 x 106 torr
  • 50kW induction heating inverter
  • Process control software for recipe generation and editing, real time process control, data logging and display
  • Metal seal mass flow controllers and gas manifold with in-line purifiers
  • Pressure control from 1-700 torr
  • Stainless steel flanges
  • Pyrometers for top and bottom temperature measurement
  • Graphite crucible components

Epitaxial Growth Systems (Epi)

Key Features & Capabilities

  • Vertical and horizontal configurations available
  • Typical capacity of 3x4" or 6x2" wafers/run (1x8" capable)
  • Reactor designed with specific end uses in mind such as Silicon Carbide (SiC) bipolar transistors, Gallium Nitride (GaN) on Silicon (Si) power devices, Gallium Oxide (GaO) materials development
  • Double-walled water-cooled chamber
  • Inductively heated
  • Equipped with crucible rotation
  • Offered with standard Silicon Carbide (SiC) process (n- and p-type in same growth run)
  • Advanced processes and other materials available upon request

Standard Equipment Configuration

  • Process control software for recipe generation and editing, real time process control, data logging and display with touch screen
  • Metal seal mass flow controllers and gas manifold with in-line purifiers
  • System for optimizing flow and gas system uniformity
  • Pressure control from 1-700 torr
  • Stainless steel flanges
  • Pyrometers for top and bottom temperature measurement
  • Coated graphite susceptor components standard
  • Scrubber system available upon request